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ion etching of SiC in SF6 gas: detection of CF, CF2 and

Reactive ion etching of SiC in SF6 gas: detection of CF, CF2 and SiF2 etch products. Applied Physics Letters, American Institute of Physics, 2001,

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SF6(Winfoss-R1Gas)_()

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10. A method for purifying a fluorine compound gas by removing a metal SF6 and BF3, and contains hydrogen fluoride and at least one metal

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Abstract: The sensing properties of monolayer arsenic phosphorus (AsP) for the adsorption of SF6, H2O, O2, and SF6 decomposition gases (SO2 and H2S)

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ive photoacoustic multicomponent gas sensor for SF6

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Instruments, Sensors and Other Measurement Devices | Vaisala

Product type Device Digital Software Service System Page type Article SF6 Gas Insulated Equipment Turbine Inlet Air Biogas Liquid Measurements