in the dielectric strength of SF6+CF4+Ar mixtures (a) 40%

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spark decomposition of SF6 and 50% SF6 + 50% CF4 mixtures

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Solubility of Gases in Liquids. 20. Solubility of He, Ne, Ar,

CF4, and SF6 dissolved in several homologous n-alkanes, n-ClH2l+2, and appropriate molecular and/or bulk properties of the gases and n-

Breakdown characteristics of SF6 /CF4 mixtures in 25.8 kV

SFsub6/sub gas has excellent dielectric strength, but it causes global warming about 23900 times more than COsub2/

Use of SF6 and CF4 | SpringerLink

The design and use of equipment and installations applying SF6 gas or SF6/CF4 gas mixtures have been considered in Sect.  12.2and Part C of this

【PDF】COLD-WEATHER APPLICATION OF GAS MIXTURE (SF6/N2, SF6/CF4)

These breakers utilize a gas mixture of SF6 and CF4 or SF6 and N2 to prevent condensation of the SF6 gas and have been type tested at -50oC to

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CO2, CH4, CF4, and SF6 in some Dimethylcyclohexanes at 298 to 313 Kmixtures of cis-+ trans-1,3-dimethylcyclohexane and cis- + trans-1,4-

Nanotubes by CF4 Plasma Treatment for SF6 Decomposition

Sulfur hexafluoride (SF6) is used as a gas medium in gas-insulated whereas CF4- and SF6-treated CNTs are highly ive to NH3 to

- Reactive ion etching of SiC in SF6 gas: detection of CF,

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field breakdown characteristics of SF6/CF4 mixtures at

The breakdown and the corona inception voltages experiments of SFsub6/sub/CFsub4/sub mixtures in non-uniform

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The films deposition rate was found to increase with the decreasing CF4 concentration in the gas mixture. Fourier transform spectroscopy revealed the

of Electron Swarm Parameters in the SF6/CF4 Gas Mixtures -

We use a binary gas mixture Monte Carlo simulation model to calculate the electron transport parameters in SF6/CF4 mixtures in uniform electric fields

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Negative ion motion in the mixtures of SF6 with CF4 and CH4-Ar.

This paper deals with the measurement of the mobility of negative ions in the mixtures of SF6 with CF4 and the CH4-Ar (50:50) binary mixture with

dielectric breakdown properties in 50%SF6-50%CF4mixtures

The characteristics of Si etching with electron cyclotron resonance (ECR) plasma of SF6–CF4 are studied in order to improve anisotropy in dry etching

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Solubility of 13 non-polar gases (He, Ne, Ar, Kr, Xe, H2~, D2

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of Si and WSiN using ECR plasma of SF6-CF4 gas mixture

Anisotropic etching of Si and WSiN using ECR plasma of SF6-CF4 gas mixture on ResearchGate, the professional network for scientists. Anisotropic etchin

Chemistry studies of SF6/CF4, SF6/O2 and CF4/O2 gas phase

operational conditions: total gas flow rate, gas pressure, and plasmas generated with SF6 and CF4 mixtures or mixed separately with

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for separation of SF6 from CF4 /air-containing gas stream

2002521-A method and apparatus for the separation and recovery of SF.sub.6 from a gas mixture consisting essentially of SF.sub.6, CF.sub.4, and N.su