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Gas phase and reactor wall-surface kinetics are coupled in a global model for SF6 plasmas. A complete set of gas phase and surface reactions is

【PDF】for SF6 plasmas coupling reaction kinetics in the gas

10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls

【PDF】for SF6 plasmas coupling reaction kinetics in the gas

10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls

【PDF】for SF6 plasmas coupling reaction kinetics in the gas

10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls

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10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls

【PDF】for SF6 plasmas coupling reaction kinetics in the gas

10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls

【PDF】for SF6 plasmas coupling reaction kinetics in the gas

10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls

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10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls

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【PDF】for SF6 plasmas coupling reaction kinetics in the gas

10.1088/0022-3727/42/5/055209 A global model for SF6 plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls